A range of amorphous structures for a single
chemical-composition material (Indium Oxide)
were observed; the structure dependent on
the growth conditions.
The carrier mobility and film (not carrier)
density of the films was dependent on growth
Films grown at 0°C and below are amorphous
The film density decreased from 7.0 g/cm3
at 0°C to 5.4 g/cm3 at -100°C; the carrier
mobility decrease from ~57 cm2/V•s to ~20
cm2/V•s over this same temperature range.
The peak in mobility at 0°C adds to the body
of evidence that the best transport properties
for amorphous films are achieved at a growth
temperature just below that at which
crystallinity is observed.