Europium-doped yttrium oxide (Eu-Y2O3) luminescent films have been produced directly from a solution precursor using a radio frequency (RF) plasma spray technique. Highly crystalline and luminescent films were grown on Si (100) and steel substrates by this process. X-ray diffraction analyses on these films confirm that polycrystalline cubic Y2O3 phase has formed in-situ with no impurity phases. The enhanced photo luminescence (PL) intensity observed from these films is in all probability due to the highly crystalline nature of the coating combined with spherical morphology of the grains and the sub micron grain size.Red emission from Eu-Y2O3 Film when excited with a Mineralight UV lamp.