The UD Nanofabrication Facility (UDNF) enables researchers from academia, industry and government to create devices smaller than a human hair, supporting scientific advances in fields ranging from medical diagnostics to environmental sensing to solar energy harvesting.
Facility Primary Contact: Iulian Codreanu
Instrumentation:
- Deposition (ALD, Evaporators, PECVD, PLD, Sputterer)
- Dry Etch (Asher, Chlorine ICP, Fluorine ICP, Ion Mill, Plasma Cleaner)
- Film Casting (E-beam SBU1, E-beam SBU2, Photo SBU1, Photo SBU2, SU-8 SBU)
- Lithography (E-beam Writer, Laser Writer, Mask Aligner)
- Metrology (Ellipsometer, Four-Point Probe Station, Microscopes, Profilometer, SEM)
- Miscellaneous (Critical Point Dryer, Developing Station, Mask Cleaner Station, Ozone Cleaner, Wet Benches)
- Packaging (Dicing Saw, Wire Bonder)
- Thermal Processing (HMDS Oven, Rapid Thermal Processor, Tube Furnace, Vacuum Ovens)
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