The Minnesota Nano Center, or MNC, is a state-of-the-art facility for interdisciplinary research in nanoscience and applied nanotechnology. The Center offers a comprehensive set of tools to help researchers develop new micro- and nanoscale devices, such as integrated circuits, advanced sensors, microelectromechanical systems (MEMS), and microfluidic systems. The MNC is also equipped to support nanotechnology research that spans many science and engineering fields, allowing advances in areas as diverse as cell biology, high performance materials, and biomedical device engineering.
The MNC is composed of two main facilities, located in Keller Hall and in the new Physics and Nanotechnology (PN) building. The new PN Lab facility features a 5000 square foot Class 100 cleanroom with state-of-the-art tools for fabricating structures under 100 nanometers in size. The PN facility also offers two new specialized labs to support interdisciplinary research in bio- nanotechnology and nano-and micrometer-scale materials.
The MNC also maintains full facilities for microfabrication in Keller Hall. The Keller Lab has a 3000 square foot Class 100 clean room, and an additional 4000 square feet of labs and support areas. The tool set in this clean room is ideal for fabricating MEMS and other devices with features size of one micron or larger.
The labs and tools of the Minnesota Nano Center are open to all qualified users. We welcome researchers from industry and other academic institutions. Use this site to learn about the MNC and the nanotechnology research advancing at the University of Minnesota, and find out how we can support your research and development efforts!
- AJA Sputterer
- AJA Sputterer 2
- ALD
- Amray FESEM
- Asher
- Atomic Force Microscope
- AV Etcher
- Canon Stepper
- CEE 200X Spinner
- CHA Evaporator
- Confocal Microscope
- Critical Point Dryer
- CV-IV
- DC Sputter
- Deep Trench Etcher
- Dektak
- Exhausted Blue M Oven
- FEI FIB
- Four Point Probe
- Gaertner Ellipsometer
- Hard Bake Oven
- Headway
- Ion Mill
- JEOL SEM
- Karl Suss Contact Mask Aligner
- Karl Suss Contact Mask Aligner
- KLA-Tencor P-16
- LPCVD
- Mask Maker
- Mini-Brute Furnace
- MJB-3
- Nanonex NX-B200 Nanoimprinter
- Nanospec-1
- Nanospec-2
- Oriel
- Oxford
- PECVD
- Prebake Dehydration Oven
- Precision Spin Coater
- Precision Spin Coater
- RTA-1
- Rudolph Ellipsometer
- SB6
- Soft Bake Oven
- Spray/Puddle Developer
- Stress Test-1
- STS Etcher
- SUPER-NUOVA Hot Plates
- Temescal E-beam
- Thermal Evaporator
- Tylan Furnace Bank
- UVO Cleaner
- Varian E-beam
- Vistec EBPG5000+
- Wafer Saw
- Wet Benches
- Xenon di-fluoride e1-series etching system
- YES 310