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Microfabrication Facility

The current microfabrication facility contains a contact mask alignment and photoresist exposure system, fume hoods, spin coating station, PDMS mixer and degasser, PDMS bonding equipment (oven, AC oxygen plasma), PDMS hole punch and stereo zoom microscope. The equipment is housed in a 250 sq. ft. class 10,000 clean room. With MRSEC funds we will expand our microfluidic fabrication needs, but we lack work stations dedicated to operating the devices. We are developing a shared facility where users can run chips using either pressure or volume control. The facility will have four stations containing: one advanced microscope, one high-speed camera and two low-resolution video systems. Each station will have a motorized translation stage.