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Scanning Probe Microscopy

The Scanning Probe Microscopy (SPM) Facility provides nanometer-scale characterization of materials surface and related physical properties by using Atomic Force Microscopy (AFM), Magnetic Force Microscopy (MFM), Electrostatic Force Microscopy (EFM), Scanning Tunneling Microscopy (STM), Piezoresponse Microscopy (PFM),  Surface Potential Microscopy (PeakForce KPFM), PeakForce Tunneling AFM (PF-TUNA) and Quantitative Nanomechanical Property Mapping (PF-QNM), etc. 
It can provide three-dimensional high contrast topographic images with sub-nanometer resolution in air routinely, including line width, grain size, pitch and depth, roughness measurements, sectioning of surfaces, power spectral density, particle analysis, surface defects, and pattern recognition, etc. Depending on the interaction of scanning probe and sample surface, a variety of surface physical properties can be measured in addition to surface morphology, such as electrical, magnetic, and nanomechanical properties.