The Cleanroom and Processing Lab is located in Hill Hall along with the Synthesis Lab and Chemical Vapor Deposition Lab. The labs constitute a unique, co-located exploratory materials synthesis, deposition, and processing capabilities. The Cleanroom is Class 1000 with photolithographic tools for substrates up to 3" (76 mm) diameter and features down to 2 um. It has an adjacent Class 10000 Processing Lab with processing equipment for making electronic devices. The lab supports our PHGN/CHEN435 and CHEN/PHGN/MLGN535 Interdisciplinary Microelectronics Processing Laboratory class and support laboratory research.