Micro/Nano Fabrication Laboratory @ Princeton University
Used for: | Microfabrication / Microelectronics / Clean Room |
The Micro/Nano Fabrication Laboratory at Princeton University, directed by Dr. Helena Gleskova, is centered in a 4,000-square-foot clean room containing a complete range of thin-film formation techniques, such as plasma-enhanced chemical vapor deposition, thermal and electron-beam evaporators, sputterers, and high-temperature diffusion and oxidation. Another strength of the facility is pattern transfer by plasma, with five reactors dedicated to etching a wide range of thin films. Recent additions include a state-of-the-art laser writer and nanoimprinter, and a modern electron beam writer. For more information, including how to access the Micro/Nano Fabrication Laboratory, please visit: http://www.prism.princeton.edu/PRISM_cleanroom/fabrication.htm