Materials Processing Microfabrication Cleanroom @ Northwestern University
FUNCTION:
The Materials Research Center (MRC) cleanroom facility is devoted to materials processing, thin film deposition, device fabrication, and electronic & photonic materials. The MRC cleanroom complex in Cook Hall provides microfabrication and thin film processing capabilities. The facility includes class 100 and 1000 cleanrooms. The facility provides microfabrication tools for general use by the Northwestern community, government and industrial researchers. Various techniques are available for deposition and processing of a wide range of thin film materials including in-process characterization. Training of equipment and assisted use within the facility is available to provide the necessary expertise.
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This provides a centralized resource for the deposition of metal, semiconductor & dielectric thin films, photolithography, and processing. Standard microfabrication processes have been established. Available techniques include plasma enhanced chemical vapor deposition, e-beam evaporation, reactive ion etching, photolithography and some characterization instrumentation.
