Device Fabrication & Measurements @ University of Washington
Used for: | Microfabrication / Microelectronics / Clean Room |
Device Fabrication and Measurements Laboratories include e-beam lithography system (Roberts 140, MSE Department), micro-contact printing (Bagley 195, Xia), and dip-pen lithography and vacuum deposition (Bagley 13B, Ginger). Device measurements include photonic (Roberts 209, Jen) and electronic (EE B052, Parviz) techniques.
Contact Dr. Hanson Fong for details.