Chapel Hill Analytical and Nanofabrication Laboratory (CHANL) houses facilities for materials characterization and a versatile suite of instrumentation for micro and nanofabrication.
Instrumentation:
- DRIE (Alcatel AMS)
- Electron Beam Evaporator
- ESEM
- FIB (FEI Helios 600 Nanolab Dual Beam System)
- Hot Embosser (JenOptik HX03)
- Laser Ablation
- Mask Aligner
- Metal Sputtering
- Oxygen Plasma System
- PECVD
- PLD (PVD Products Nano-PLD-1000 Pulsed Laser Deposition System)
- SEM (Hitachi S-4700 Cold Cathode Field Emission Scanning Electron Microscope)
- Stylus Profiler: KLA Tencor P-6
- Thin-Film Mapper: Filmetrics F50
- Ultramicrotome
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