Shared Facilities

Nano Fabrication Center
The Nanofabrication Center (NFC) is an interdisciplinary facility that supports faculty and industrial research within the Institute of Technology at the University of Minnesota, to support education, research and industrial collaboration in microelectronics and other related research involving nanofabrication.
Intrumentation:
The Nano Fabrication Center main […]

Device Fabrication and Measurements Laboratories include e-beam lithography system (Roberts 140, MSE Department), micro-contact printing (Bagley 195, Xia), and dip-pen lithography and vacuum deposition (Bagley 13B, Ginger). Device measurements include photonic (Roberts 209, Jen) and electronic (EE B052, Parviz) techniques.
Contact Dr. Hanson Fong for details.

The microfabrication facility, run by the Department of Electrical and Computer Engineering at UC Davis, is available to CPIMA members via subcontract.

Access to major nanofabrication facilities of the Stanford Center for Integrated Systems is provided to CPIMA members.

This new facility consists of an SEM (FEI XL-30) for electron-beam lithography, a probe station (Cascade 12000) for electrical characterization, and three scanned-probe microscopes (SPMs) for in situ electrical measurement of devices concurrent with electrostatic force and scanned-gate microscopy. One SPM (DI-Dimension 5000) is configured for electrically contacting samples, and another SPM (JEOL-4210) has controlled […]

The Micro/Nano Fabrication Laboratory at Princeton University, directed by Dr. Helena Gleskova, is centered in a 4,000-square-foot clean room containing a complete range of thin-film formation techniques, such as plasma-enhanced chemical vapor deposition, thermal and electron-beam evaporators, sputterers, and high-temperature diffusion and oxidation. Another strength of the facility is pattern transfer by plasma, with […]

The Materials Preparation Laboratory provides facilities for sample fabrication, processing, patterning and characterization. In response to demands in nanofabrication and synthesis, we have more tightly coupled sample fabrication and characterization by incorporating the previously separate Spectroscopic Facility into the Prep Lab. Key capabilities include: a cleanroom area that houses a Digital Instruments Nanoscope IIIa AFM/STM with capabilities for contact and tapping AFM imaging modes, STM, electro-chemistry, and an environmental sample chamber for in-situ AFM imaging up to +250 °C.

The MFF is a self-contained user facility administered by the CAF. It consists of several deposition and etch units, as well as capabilities for photolithography, enclosed in a Class 100/1000 clean room. A full-time research scientist oversees the facility on a daily basis, with the assistance of post-doctoral, graduate and undergraduate researchers. Together they train […]